MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
This reference work discusses topics such as: lithography; pattern transfer; wet and dry bulk micromachining; surface micromachining; and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are also e
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integra
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling la
Full coverage of electronics, MEMS, and instrumentation and control in mechanical engineering This second volume of Mechanical Engineers' Handbook covers electronics, MEMS, and instrumentation and control, giving you accessible and in-depth access to the topics you'll encounter in the discipline: computer-aided design, product design for manufacturing and assembly, design optimization, total quality management in mechanical system design, reliability in the mechanical design process for sustainability, life-cycle design, design for remanufacturing processes, signal processing, data acquisition and display systems, and much more. The book provides a quick guide to specialized areas you may encounter in your work, giving you access to the basics of each and pointing you toward trusted resources for further reading, if needed. The accessible information inside offers discussions, examples, and analyses of the topics covered, rather than the straight data, formulas, and calculations you'll find in other handbooks. Presents the most comprehensive coverage of the entire discipline of Mechanical Engineering anywhere in four interrelated books Offers the option of being purchased as a four-book set or as single books Comes in a subscription format through the Wiley Online Library and in electronic and custom formats Engineers at all levels will find Mechanical Engineers' Handbook, Volume 2 an excellent resource they can turn to for the basics of electronics, MEMS, and instrumentation and control.
Focusing on a description of the technologies and methodologies for computer-aided conceptual design, this book covers the design, modeling and simulation of micropower generation devices. The articles are authored by internationally recognized experts in the field, who take the reader from fundamentals and design aspects to numerous power generation strategies and system engineering. The comprehensive coverage also extends to fuel processing, energy conversion, material and heat management, device operation, economics and quality control. For materials scientists, chemists, physicists, process engineers and those in power technology.
Electrostatic Accelerators have been at the forefront of modern technology since the development by Sir John Cockroft and Ernest Walton in 1932 of the first accelerator, which was the first to achieve nuclear transmutation and earned them the Nobel Prize in Physics in 1951. The applications of Cockroft and Walton's development have been far reaching, even into our kitchens where it is employed to generate the high voltage needed for the magnetron in microwave ovens. Other electrostatic accelerator related Nobel prize winning developments that have had a major socio-economic impact are; the electron microscope where the beams of electrons are produced by an electrostatic accelerator, X-rays and computer tomography (CT) scanners where the X-rays are produced using an electron accelerator and microelectronic technology where ion implantation is used to dope the semiconductor chips which form the basis of our computers, mobile phones and entertainment systems. Although the Electrostatic Accelerator field is over 90 years old, and only a handful of accelerators are used for their original purpose in nuclear physics, the field and the number of accelerators is growing more rapidly than ever. The objective of this book is to collect together the basic science and technology that underlies the Electrostatic Accelerator field so it can serve as a handbook, reference guide and textbook for accelerator engineers as well as students and researchers who work with Electrostatic Accelerators.
