Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.
Drawing on their experiences in successfully executing hundreds of MEMS development projects, the authors present the first practical guide to navigating the technical and business challenges of MEMS product development, from the initial concept stage all the way to commercialization. The strategies and tactics presented, when practiced diligently, can shorten development timelines, help avoid common pitfalls, and improve the odds of success, especially when resources are limited. MEMS Product Development illuminates what it really takes to develop a novel MEMS product so that innovators, designers, entrepreneurs, product managers, investors, and executives may properly prepare their companies to succeed.
The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas. Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics. With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications Discusses wireless techniques and applications of wireless MEMS, including biomedical applications Describes monitoring structures and the environment with wireless MEMS
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.
Mechatronics has evolved into a way of life in engineering practice, and it pervades virtually every aspect of the modern world. In chapters drawn from the bestselling and now standard engineering reference, The Mechatronics Handbook, this book introduces the vibrant field of mechatronics and its key elements: physical system modeling; sensors and actuators; signals and systems; computers and logic systems; and software and data acquisition. These chapters, written by leading academics and practitioners, were carefully selected and organized to provide an accessible, general outline of the subject ideal for non-specialists. Mechatronics: An Introduction first defines and organizes the key elements of mechatronics, exploring design approach, system interfacing, instrumentation, control systems, and microprocessor-based controllers and microelectronics. It then surveys physical system modeling, introducing MEMS along with modeling and simulation. Coverage then moves to essential elements of sensors and actuators, including characteristics and fundamentals of time and frequency, followed by control systems and subsystems, computer hardware, logic, system interfaces, communication and computer networking, data acquisition, and computer-based instrumentation systems. Clear explanations and nearly 200 illustrations help bring the subject to life. Providing a broad overview of the fundamental aspects of the field, Mechatronics: An Introduction is an ideal primer for those new to the field, a handy review for those already familiar with the technology, and a friendly introduction for anyone who is curious about mechatronics.
The first comprehensive and up-to-date reference on mechatronics, Robert Bishop’s The Mechatronics Handbook was quickly embraced as the gold standard for the field. With updated coverage on all aspects of mechatronics, The Mechatronics Handbook, Second Edition is now available as a two-volume set. Each installment offers focused coverage of a particular area of mechatronics, supplying a convenient and flexible source of specific information. This seminal work is still the most exhaustive, state-of-the-art treatment of the field available. Mechatronics Systems, Sensors, and Actuators: Fundamentals and Modeling presents an overview of mechatronics, providing a foundation for those new to the field and authoritative support for seasoned professionals. The book introduces basic definitions and the key elements and includes detailed descriptions of the mathematical models of the mechanical, electrical, and fluid subsystems that comprise mechatronic systems. New chapters include Mechantronics Engineering Curriculum Design and Numerical Simulation. Discussion of the fundamental physical relationships and mathematical models associated with commonly used sensor and actuator technologies complete the coverage. Features Introduces the key elements of mechatronics and discusses new directions Presents the underlying mechanical and electronic mathematical models comprising many mechatronic systems Provides a detailed discussion of the process of physical system modeling Covers time, frequency, and sensor and actuator characteristics
Issues in Teaching and Education Policy, Research, and Special Topics: 2013 Edition is a ScholarlyEditions™ book that delivers timely, authoritative, and comprehensive information about Education Testing and Evaluation. The editors have built Issues in Teaching and Education Policy, Research, and Special Topics: 2013 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Education Testing and Evaluation in this book to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Issues in Teaching and Education Policy, Research, and Special Topics: 2013 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.
Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.
For the second edition of 'Microreactors in Organic Chemistry and Catalysis' all chapters have been revised and updated to reflect the latest developments in this rapidly developing field. This new edition has 60% more content, and it remains a comprehensive publication covering most aspects of the topic. The use of microreactors in homogeneous, heterogeneous as well as biphasic reactions is covered in the main part of the book, together with catalytic, bioorganic and automation approaches. The initial chapters also provide a solid physical chemistry background on fluidics in microdevices. Finally, a chapter on industrial applications and developments covers recent progress in process chemistry. An excellent reference for beginners and experts alike.
